Wednesday, May 22, 2013

Solution for Thin-Film Curvature Measurement

With over 20 years of market experience, k-Space Associates, Inc. offers services in advanced thin-film metrology for research, development, and production. As the leading manufacturer of in-situ, in-line, and ex-situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries, k-Space offers a wide variety of solutions for your business. k-Space understands the importance of understanding and controlling stress in thin-film and thermal annealing processes for the optimal performance and enquires thin-film curvature measurement and monitoring through a specially patented technique.

The k-space Multi-beam Optical Sensor, or kSA MOS, can measure two-dimensional, dynamic curvature and stress profiles with enough speed for real-time measurement and process control. It is ideal for thin-film curvature measurement and is currently being used for in-situ stress monitoring and control at leading R&D and full production facilities worldwide. To get more information about k-Space and their large selection of tools and expertise, visit the k-Space website.

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